PAT, S. Et Al. 2017. The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique. VACUUM , vol.141 , 210-215.

PAT, S., Mohammadigharehbagh, R., Ozen, S., ŞENAY, V., Yudar, H. H., & KORKMAZ, Ş., (2017). The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique. VACUUM , vol.141, 210-215.

PAT, SUAT Et Al. "The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique," VACUUM , vol.141, 210-215, 2017

PAT, SUAT Et Al. "The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique." VACUUM , vol.141, pp.210-215, 2017

PAT, S. Et Al. (2017) . "The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique." VACUUM , vol.141, pp.210-215.

@article{article, author={SUAT PAT Et Al. }, title={The Al doping effect on the surface, optical, electrical and nanomechanical properties of the ZnO and AZO thin films prepared by RF sputtering technique}, journal={VACUUM}, year=2017, pages={210-215} }