Yi, S. Et Al. 2017. Run-to-Run Control Strategy of HARP Liner Thickness with Product Dependent Deposition Rates. XXIX Advanced Process Control Conference , (Austin, TX, United States Of America).

Yi, S., ÇİNAR, E., Wang, M., Lee, Y., & Minton, P., (2017). Run-to-Run Control Strategy of HARP Liner Thickness with Product Dependent Deposition Rates . XXIX Advanced Process Control Conference, Austin, TX, United States Of America

Yi, Sang Et Al. "Run-to-Run Control Strategy of HARP Liner Thickness with Product Dependent Deposition Rates," XXIX Advanced Process Control Conference, Austin, TX, United States Of America, 2017

Yi, Sang Et Al. "Run-to-Run Control Strategy of HARP Liner Thickness with Product Dependent Deposition Rates." XXIX Advanced Process Control Conference , Austin, TX, United States Of America, 2017

Yi, S. Et Al. (2017) . "Run-to-Run Control Strategy of HARP Liner Thickness with Product Dependent Deposition Rates." XXIX Advanced Process Control Conference , Austin, TX, United States Of America.

@conferencepaper{conferencepaper, author={Sang Yi Et Al. }, title={Run-to-Run Control Strategy of HARP Liner Thickness with Product Dependent Deposition Rates}, congress name={XXIX Advanced Process Control Conference}, city={Austin, TX}, country={United States Of America}, year={2017}}