PAT, S. Et Al. 2015. A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering. INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING , vol.9, no.5 , 415-424.

PAT, S., Ozen, S., ŞENAY, V., Aydogmus, T., Elmas, S., KORKMAZ, Ş., ... Ekem, N.(2015). A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering. INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING , vol.9, no.5, 415-424.

PAT, SUAT Et Al. "A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering," INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING , vol.9, no.5, 415-424, 2015

PAT, SUAT Et Al. "A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering." INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING , vol.9, no.5, pp.415-424, 2015

PAT, S. Et Al. (2015) . "A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering." INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING , vol.9, no.5, pp.415-424.

@article{article, author={SUAT PAT Et Al. }, title={A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering}, journal={INTERNATIONAL JOURNAL OF SURFACE SCIENCE AND ENGINEERING}, year=2015, pages={415-424} }