PAT, S. Et Al. 2018. Cubic BN thin film deposition by a RF magnetron sputtering. VACUUM , vol.157 , 31-35.

PAT, S., Silik, E., Musaoglu, C., Ozen, S., Mohammadigharehbagh, R., Yudar, H. H., ... KORKMAZ, Ş.(2018). Cubic BN thin film deposition by a RF magnetron sputtering. VACUUM , vol.157, 31-35.

PAT, SUAT Et Al. "Cubic BN thin film deposition by a RF magnetron sputtering," VACUUM , vol.157, 31-35, 2018

PAT, SUAT Et Al. "Cubic BN thin film deposition by a RF magnetron sputtering." VACUUM , vol.157, pp.31-35, 2018

PAT, S. Et Al. (2018) . "Cubic BN thin film deposition by a RF magnetron sputtering." VACUUM , vol.157, pp.31-35.

@article{article, author={SUAT PAT Et Al. }, title={Cubic BN thin film deposition by a RF magnetron sputtering}, journal={VACUUM}, year=2018, pages={31-35} }