ANIK, M. 2004. Selection of an oxidant for copper CMP. 205th ECS Meeting , (San Antonio, TX, United States Of America), 327-337.

ANIK, M., (2004). Selection of an oxidant for copper CMP . 205th ECS Meeting (pp.327-337). San Antonio, TX, United States Of America

ANIK, MUSTAFA. "Selection of an oxidant for copper CMP," 205th ECS Meeting, San Antonio, TX, United States Of America, 2004

ANIK, MUSTAFA. "Selection of an oxidant for copper CMP." 205th ECS Meeting , San Antonio, TX, United States Of America, pp.327-337, 2004

ANIK, M. (2004) . "Selection of an oxidant for copper CMP." 205th ECS Meeting , San Antonio, TX, United States Of America, pp.327-337.

@conferencepaper{conferencepaper, author={MUSTAFA ANIK}, title={Selection of an oxidant for copper CMP}, congress name={205th ECS Meeting}, city={San Antonio, TX}, country={United States Of America}, year={2004}, pages={327-337} }