ZnO thin film synthesis by reactive radio frequency magnetron sputtering

ŞENAY V., PAT S., KORKMAZ Ş., Aydogmus T., Elmas S., Ozen S., ...Daha Fazla

APPLIED SURFACE SCIENCE, cilt.318, ss.2-5, 2014 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 318
  • Basım Tarihi: 2014
  • Doi Numarası: 10.1016/j.apsusc.2013.10.044
  • Dergi Adı: APPLIED SURFACE SCIENCE
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.2-5
  • Anahtar Kelimeler: ZnO, RF sputtering, Optical properties, Surface properties, ELECTRICAL-PROPERTIES, OPTICAL-PROPERTIES, NANOROD ARRAYS, TEMPERATURE, DEPOSITION
  • Eskişehir Osmangazi Üniversitesi Adresli: Evet

Özet

In this study, ZnO thin films were deposited on glass substrates by reactive RF magnetron sputtering method at argon-oxygen gas mixing (1:1) atmosphere. Some properties of the synthesized films were investigated by interferometry, UV-vis spectrophotometer, atomic force microscopy, and tensiometer. Tauc method was adopted to estimate the optical band gaps. The band gaps of the deposited films were affected by film thickness. We concluded that the surface composition plays a substantial role in the values of the band gaps. Nanocrystalline structures were detected in all produced samples. (C) 2013 Elsevier B.V. All rights reserved.