JOURNAL OF ELECTRONIC MATERIALS, cilt.49, sa.9, ss.5542-5551, 2020 (SCI-Expanded)
TiO(2)films are widely used in such technological applications as solar cells, photocatalysts and gas sensors due to their interesting physical, chemical and optical properties. In the present work, multilayer anatase-TiO(2)films were produced by the sol-gel spin coating technique. The effects of the number of coating layers (4, 5, 6 and 7) on the structural, optical and surface properties of TiO(2)films are reported in detail. The optimal number of spinning cycles was determined as 6-7 to produce anatase-TiO(2)films having improved structural properties, as obtained by x-ray diffraction analysis. Spectroscopic ellipsometry was used to determine the thickness, refractive index and extinction coefficient values. Transmittance spectra showed that TiO(2)films produced after 4, 5 and 7 spinning cycles were highly transparent in the visible region. In addition, the direct band gaps of the TiO(2)films were calculated as 3.47-3.69 eV by using optical measurements. The possible deep trap levels, which act as recombination centers, were investigated by photoluminescence spectra analysis. The atomic force microscopy images showed that sixfold spin coating resulted in improved surface homogeneity and reduced roughness values. This study indicates that TiO(2)film having 6 layers may be a potential candidate in photocatalytic applications due to its desired structural, optical and surface properties.