The properties of substrates used to deposit thin films are an important parameter in thin film production. Instead of using a commercial substrate, in this work, borate and phosphate glasses have been obtained by classic melt-quenching technique to be used as substrates for CdO films. Also, a microscope glass substrate has been used to compare the coating properties by other glass substrates. All films have been produced by Ultrasonic Spray Pyrolysis technique. The substrate temperature has been selected as 275 +/- 5 degrees C. Thicknesses and some optical parameters such as refractive index and extinction coefficient have been determined by spectroscopic ellipsometry. Absorbance and transmittance spectra have been taken by UV/VIS spectrophotometer. Four-probe method has been used to determine the electrical resistivity values of the films. XRD investigations have shown that type of the substrate dramatically affects the characteristics of CdO films. CdO film deposited on phosphate glass substrate has the best structural quality. Atomic Force Microscope has been used to investigate the surface properties and roughness values of the films. (C) 2012 Published by Elsevier B.V.