Investigation of properties of boron thin film deposited by thermionic vacuum arc technology


Ekem N., AKAN T., Pat S., Balbag M. Z. , Cenik M. I. , Karakas E., ...More

6th International Conference of the Balkan-Physical-Union, İstanbul, Turkey, 22 - 26 August 2006, vol.899, pp.699 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 899
  • Doi Number: 10.1063/1.2733440
  • City: İstanbul
  • Country: Turkey
  • Page Numbers: pp.699
  • Eskisehir Osmangazi University Affiliated: Yes

Abstract

In this study, we first used boron as anode material in the TVA system. We also present boron thin film deposition using TVA technology.