Investigation of properties of boron thin film deposited by thermionic vacuum arc technology

Ekem N., AKAN T., Pat S., Balbag M. Z., Cenik M. I., Karakas E., ...More

6th International Conference of the Balkan-Physical-Union, İstanbul, Turkey, 22 - 26 August 2006, vol.899, pp.699 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • Volume: 899
  • Doi Number: 10.1063/1.2733440
  • City: İstanbul
  • Country: Turkey
  • Page Numbers: pp.699
  • Keywords: TVA, boron, thin film, properties of boron thin film
  • Eskisehir Osmangazi University Affiliated: Yes

Abstract

In this study, we first used boron as anode material in the TVA system. We also present boron thin film deposition using TVA technology.