Carbon thin films were deposited on the Si and glass substrate by using TVA method Carbon films were deposited (thickness appr. 50-90 nm) by TVA at about 10-5 Torr. The refractive index (n) and thickness of the deposited thin films were measured by Filmmetrics F20 device. Atomic force microscopies (AFM) were used for the surface morphology of the deposited film. In addition, Roughness of the deposited carbon thin films was realized by using AFM Roughness mode.