Research Information System
2019 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2019, Genting Highland, Pahang, Malaysia, 21 - 23 August 2019, pp.50-52, (Full Text)
WO3 is known as one of the most important and promising gas sensing materials among the other metal oxides due to their superior sensing performance, low cost, easy to produce and compatibility with modern electronic devices. As the properties of gas sensors are considered, challenging issues such as high sensitivity, good selectivity, fast response and recovery can be achieved by increasing the surface area which requires nano surface morphologies. In this study, we present nano-wall WO3 structures grown by RF sputtering for the hydrogen gas sensing performances. Nano-wall structures (NWSs) have been grown in three different thicknesses (300 nm, 600 nm, 1200nm) on glass substrates and different growth temperatures on fused silica substrate (500-800 °C). On the other hand, these NWSs were grown on the interdigitate contacts for electrical gas sensor measurements.