Mechanical properties of deposited carbon thin films on sapphire substrates using atomic force microscopy (AFM)

PAT S., BALBAĞ M. Z., KORKMAZ Ş.

CERAMICS INTERNATIONAL, vol.40, no.7, pp.10159-10162, 2014 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 40 Issue: 7
  • Publication Date: 2014
  • Doi Number: 10.1016/j.ceramint.2014.02.041
  • Journal Name: CERAMICS INTERNATIONAL
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.10159-10162
  • Eskisehir Osmangazi University Affiliated: Yes

Abstract

In this study, the mechanical properties of nano-layered carbon thin films deposited on Al2O3 single crystal substrates with varying orientations in A (1120), M (1010), R (1102) and C (0001) planes were investigated using depth-sensing nanoindentation techniques. All of the nano-layered films were deposited by a thermionic vacuum arc (TVA). In this experiment, a high purity amorphous carbon rod was used. Single crystal Al2O3 plates were used as the substrate material. All of the substrates were a commercial product that is readily available. For the surface topography, the roughness and depth-sensing nano-hardness of the deposited films were analyzed using an Ambios Q-scope atomic force microscope. An F20 thin film measurement system was used for the determination of thickness and reflection properties of the deposited thin films. Indention depths were determined as 5 nm, 10 nm and 15 nm. In these indentation depths, hardness values were calculated in the range of 8-25 GPa. (C) 2014 Elsevier Ltd and Techna Group S.r.l. All rights reserved.