Comparison of the LaF3 Thin Films Deposited on Glass and Polyethylene Terephthalate

PAT S., KORKMAZ Ş., Ekem N., BALBAĞ M. Z., Elmas S.

Journal of Nanoelectronics and Optoelectronics, vol.9, no.4, pp.546-548, 2014 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 9 Issue: 4
  • Publication Date: 2014
  • Doi Number: 10.1166/jno.2014.1621
  • Journal Name: Journal of Nanoelectronics and Optoelectronics
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.546-548
  • Keywords: LaF3 Thin Films, Plasma, Optical Properties, Surface Properties, Cathode Materials, LANTHANUM FLUORIDE, 193 NM, EVAPORATION, IMPEDANCE, BATTERY
  • Eskisehir Osmangazi University Affiliated: Yes


Lanthanum fluoride (LaF3) coated Li-ion cathode materials are improved the electrochemical performance. Polyethylene terephthalate (PET) materials are also used as separator in Li-ion rechargeable batteries because of good electrochemical performance. In this study, optical and surface morphologies of coated PET and glass samples properties were investigated. Transmittances, thickness, reflectance, and refractive indices of coated LaF3 thin films were measured by a UV-Vis spectrophotometer and interferometry. Atomic force microscopy were used to characterize coated LaF3 thin films surface morphologies. According to the obtained results, coated LaF3 thin films have lower reflection. Deposited LaF3 thin films have homogeneity, low surface roughness, transparent and low reflectance. According to XRD measurements, these samples are amorphous. This production technique is a proper method for LaF3 coated PET and glass substrates. These produced films should be used as separator in rechargeable batteries because of high fluoride concentrations.