Deposition of zinc oxide/vanadium pentoxide composite thin films by thermionic vacuum arc plasma


Durmuş Ç., DEMİRKOL U., AKAN T.

Thin Solid Films, vol.814, 2025 (SCI-Expanded) identifier

  • Publication Type: Article / Article
  • Volume: 814
  • Publication Date: 2025
  • Doi Number: 10.1016/j.tsf.2025.140631
  • Journal Name: Thin Solid Films
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, PASCAL, Aerospace Database, Applied Science & Technology Source, Chemical Abstracts Core, Chimica, Communication Abstracts, Compendex, INSPEC, Metadex, Civil Engineering Abstracts
  • Keywords: Bilayer, Composite, Heterostructure, Thermionic vacuum arc, antibacterial, Thin film, Vanadium pentoxide, Zinc oxide
  • Eskisehir Osmangazi University Affiliated: Yes

Abstract

The study involved the deposition of Zinc oxide/vanadium pentoxide (ZnO/V2O5) composite thin films on the glass substrates using the Thermionic Vacuum Arc (TVA) plasma process. Three methods were employed: (1) ZnO and V2O5 powders were mixed in a 50:50 molar ratio, and plasma was generated in the same crucible (V + Z), (2) V2O5 plasma was deposited first, followed by ZnO (VZ), and (3) ZnO plasma was deposited first, followed by V2O5 (ZV). These deposition processes were performed entirely within the TVA system without removing the samples from the vacuum environment. This approach significantly reduced the risk of contamination and minimized processing time compared to conventional techniques. The structural, elemental, surface morphological, optical, and antibacterial properties of the deposited thin films were extensively investigated. The thin films exhibited primarily amorphous structures with some crystalline formations. Optical analysis revealed a single bandgap of 3.63 eV for the V + Z sample, while VZ and ZV samples displayed dual bandgaps (2.40 eV & 3.48 eV for VZ; 2.48 eV & 3.15 eV for ZV). Antibacterial tests showed that VZ and ZV thin films had superior activity, completely inhibiting Staphylococcus aureus and Escherichia coli after 2 h, compared to the lower inhibition observed with V + Z films. These findings demonstrate the potential of ZnO/ V2O5 composite thin films, particularly layered structures, for applications requiring enhanced antibacterial properties.