MOLYBDENUM (MO) THIN FILM DEPOSITION BY THE THERMIONIC VACUUM ARC

Demirkol U., Durmuş Ç., Akan T.

TURKISH PHYSICAL SOCIETY 39TH INTERNATIONAL PHYSICS CONGRESS, Muğla, Turkey, 31 August - 04 September 2023, vol.1, no.1, pp.163, (Summary Text)

  • Publication Type: Conference Paper / Summary Text
  • Volume: 1
  • City: Muğla
  • Country: Turkey
  • Page Numbers: pp.163
  • Eskisehir Osmangazi University Affiliated: Yes

Abstract

Molybdenum is a transition metal known for its exceptionally high melting point of 2896 K. This unique characteristic presents challenges when attempting to deposit thin films of molybdenum using conventional techniques. In this study, we successfully deposited molybdenum thin films onto glass substrates using the thermionic vacuum arc method within a high vacuum environment. The morphological and structural properties of these Mo thin films were investigated using Raman spectroscopy, X-Ray diffraction (XRD), energy-dispersive X-ray spectroscopy (EDS), atomic force microscopy (AFM), and field emission scanning electron microscopy (FE-SEM). The resulting Mo thin film samples exhibited a high level of homogeneity and demonstrated low roughness values.