TURKISH PHYSICAL SOCIETY 39TH INTERNATIONAL PHYSICS CONGRESS, Muğla, Türkiye, 31 Ağustos - 04 Eylül 2023, cilt.1, sa.1, ss.163
Molybdenum is a transition metal known for its exceptionally high melting point of 2896
K. This unique characteristic presents challenges when attempting to deposit thin films of
molybdenum using conventional techniques. In this study, we successfully deposited
molybdenum thin films onto glass substrates using the thermionic vacuum arc method
within a high vacuum environment. The morphological and structural properties of these
Mo thin films were investigated using Raman spectroscopy, X-Ray diffraction (XRD),
energy-dispersive X-ray spectroscopy (EDS), atomic force microscopy (AFM), and field
emission scanning electron microscopy (FE-SEM). The resulting Mo thin film samples
exhibited a high level of homogeneity and demonstrated low roughness values.