Run-to-Run Control Strategy of HARP Liner Thickness with Product Dependent Deposition Rates

Yi S., ÇİNAR E. , Wang M., Lee Y., Minton P.

XXIX Advanced Process Control Conference, Austin, TX, United States Of America, 9 - 12 October 2017

  • Publication Type: Conference Paper / Summary Text
  • City: Austin, TX
  • Country: United States Of America